Semiconductors

Air Bearings, Rotary Unions, Slip Rings and Combinations

Your benefits

Mature equipment for vacuum processes

Ultimate accuracy is the backbone of semiconductor and wafer production. With its technically mature ferro-fluid sealing systems, GAT meets the demands implied in the transmission of rotary motion into a vacuum.

For utmost vacuum quality

Thanks to the use of fully inert magnetic-fluid seals, ROTOVAC rotary unions can be used in processes where utmost purity is a prerequisite. They can be used in ultra-high vacuum up to 10-8 mbar.

Application-specific combinations

Vacuum rotary unions from GAT are tailored to your requirements and the specifications of your application. The modular design allows the combination of any features required, including electrical slip rings.

Rotary Unions:

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ROTOKOMBI MF38 V1-1 + M50 L1
Rotary Unions ROTOVAC/ROTOPACK
Speed [rpm]80
HighlightsROTOVAC vacuum rotary union with ferro-fluid sealing technology
Rotary Union ROTOVAC
Sealing systemFerro-fluid sealing system
Number of channels1
MediumVakuum
Pressure [mbar]10-5
Rotary Union ROTOPACK
Sealing systemContact seal
Number of channels1
MediumGas
Pressure [bar]7

Slip Ring:

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ROTOFLUX ESR 70 /20
Slip Ring ROTOFLUX
Speed [rpm]15
Transmission systemGold / gold
HighlightsFerro-fluid sealing between rotating shaft and stationary housing of slip ring
Number of channels812
MediumPowerSignals
Transmission24 VDC/4 A30 VDC/20 A