Mature equipment for vacuum processes
Ultimate accuracy is the backbone of semiconductor and wafer production. With its technically mature ferro-fluid sealing systems, GAT meets the demands implied in the transmission of rotary motion into a vacuum.
For utmost vacuum quality
Thanks to the use of fully inert magnetic-fluid seals, ROTOVAC rotary unions can be used in processes where utmost purity is a prerequisite. They can be used in ultra-high vacuum up to 10-8 mbar.
Vacuum rotary unions from GAT are tailored to your requirements and the specifications of your application. The modular design allows the combination of any features required, including electrical slip rings.