Mature equipment for vacuum processes Ultimate accuracy is the backbone of semiconductor and wafer production. With its technically mature ferro-fluid sealing systems, GAT meets the demands implied in the transmission of rotary motion into a vacuum.
For utmost vacuum quality Thanks to the use of fully inert magnetic-fluid seals, ROTOVAC rotary unions can be used in processes where utmost purity is a prerequisite. They can be used in ultra-high vacuum up to 10-8 mbar.
Application-specific combinations Vacuum rotary unions from GAT are tailored to your requirements and the specifications of your application. The modular design allows the combination of any features required, including electrical slip rings.