Semiconductors
Rotary Unions, Slip Rings, Combinations and Air Bearings
Your benefits
Mature equipment for vacuum processes
Ultimate accuracy is the backbone of semiconductor and wafer production. With its technically mature ferro-fluid sealing systems, GAT meets the demands implied in the transmission of rotary motion into a vacuum.
For utmost vacuum quality
Thanks to the use of fully inert magnetic-fluid seals, ROTOVAC rotary unions can be used in processes where utmost purity is a prerequisite. They can be used in ultra-high vacuum up to 10-8 mbar.
Application-specific combinations
Vacuum rotary unions from GAT are tailored to your requirements and the specifications of your application. The modular design allows the combination of any features required, including electrical slip rings.
- Chemical mechanical polishing (CMP) and grinding
- Wafer handling robots
- Chemical vapor deposition (CVD)
- Physical vapor deposition (PVD)
- Vacuum coating systems
Application cases
Rotary Unions:
ROTOKOMBI MF38 V1-1 + M50 L1
| Rotary Unions ROTOVAC/ROTOPACK | |||
|---|---|---|---|
| Speed [rpm] | 80 | ||
| Highlights | ROTOVAC vacuum rotary union with ferro-fluid sealing technology | ||
| Rotary Union ROTOVAC | |||
|---|---|---|---|
| Sealing system | Ferro-fluid sealing system | ||
| Number of channels | 1 | ||
| Medium | Vakuum | ||
| Pressure [mbar] | 10-5 | ||
| Rotary Union ROTOPACK | |||
|---|---|---|---|
| Sealing system | Contact seal | ||
| Number of channels | 1 | ||
| Medium | Gas | ||
| Pressure [bar] | 7 | ||
Slip Ring:
ROTOFLUX ESR 70 /20
| Slip Ring ROTOFLUX | |||
|---|---|---|---|
| Speed [rpm] | 15 | ||
| Transmission system | Gold / gold | ||
| Highlights | Ferro-fluid sealing between rotating shaft and stationary housing of slip ring | ||
| Number of channels | 8 | 12 | |
| Medium | Power | Signals | |
| Transmission | 24 VDC/4 A | 30 VDC/20 A | |
